Parts & Features

AMHS Stocker:

• 200mm Wafer Storage and Handling Systems.
• Various Box/WIP stockers and automated Racks  solutions.
• Multiply capacity options, all types NT, DOS, Turbo, side /front I/O.
• Stand alone or mono rail connection options.
• All  type of silicon carriers solutions
• Full support package: Design, custom engineering, manufacturing, install, Service and spares supply

Upgrades & Spare Parts:

Refurbished Auto I/O Units:

Upgrade & Retrofit Components:

Upper Bearing Kits	Lower Bearing Kits	Lower Drive	Y & Z Axis Drive Units