b
Home Products Advanced Products

Advanced Products

AeroTrack Monorail System:

  • 200mm AeroTrack Handling System.
  • Supports various systems like 100/200/300 mono rail systems, all types NT, DOS, etc.
  • New designed Aero track smart Vehicles carry variety of loads: reticles , box, FOUPs, FOSB  and more.
  • Obtain all relevant components to support complete or partial systems requirements.
  • Full support package: Design, custom engineering, manufacturing, install, Service and spares supply

aerotrackaerotrackpowersupply-thumbaerotrackpowersupply201-thumb


horiz-separator

SVG/Nikon Pod Stocker:

  • Direct Purge Reticle Storage and Handling Systems.
  • Designed for use with XCDA/N2 as a high-volume storage device for variety of reticle pods.
  • A continuous flow of XCDA at each pod position ensures haze protection.
  • Can be supplied with RFID or BCR.
  • Can be used for 248nm and 193nm photolithography.
  • Full support package: Design, custom engineering, manufacturing, install, Service and spares supply


svgnik